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The Westlake Center for Micro/Nano Fabrication is equipped with advanced micro/nano fabrication facilities and is managed by a group of experienced engineers. The Center houses Suss mask aligner, Raith e-beam lithography (EBL) system, Samco ICP etching system, deep reactive ion etching (DRIE) system, ULVAC thin film deposition system, etc. Such equipment endows a fabrication capability for silicon and organic micro/nano devices that can fulfill the requirements of Physics, Chemistry, Electronics, Photonics, Biomedicine, Materials Science and other research disciplines. Besides the traditional fabrication tools mentioned above, the Center owns focused helium ion nanofabrication, femtolaser writing and laser direct writing tools, and offers great flexibility for creating novel complex 3D nanostructure for both scientific researches and industry prototyping projects.
With the future expansion at Yungu Campus, the Center will fully expand its electronics research capability by merging with ion implanter, stepper scanner, materials growth and device fabrication tools for III-V and II-VI semiconductors and enhancement of its structure characterization to achieve sub-nanometer resolution and 3D nano complex.
With its hardware and intellectual resources, the Westlake Center for Micro/Nano Fabrication will assist the university to become one of the first-tier universities in the world; moreover, it aims to be actively involved in the research, development and educational programs of the university.
Advanced Optoelectronic Materials & Devices
Smart Polymer Materials Lab
Advanced Photonics for Ultrafast Information Processing Laboratory
Laboratory of Photonics And Instrumentation for NanoTechnology
Cutting Edge Net of Biomedical Research and INnovation
Energy Storage & Conversion Lab